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U.S. Department of Commerce, Technology Administration
The National Institute of Standards and Technology

Advanced Measurement Laboratory | Gaithersburg, MD
NIST Advanced Measurement Laboratory
The most environmentally stable advanced technologies in the world can now be found at the new Advanced Measurement Laboratory (AML) of the National Institute of Standards and Technology (NIST). The new facility in Gaithersburg, Maryland, gives NIST and its partners in U.S. industry access to research and development capabilities unequalled in the world for research in such 21st century applications as nanotechnology, semiconductors, biotechnology, advanced materials, quantum computing and advanced manufacturing.
The new $235 million building, completed in December 2003 and officially opened in June 2004, features five separate wings with stringent environmental controls on particulate matter, temperature, humidity, vibration and electromagnetic interferences.
  PROJECT DATA
Project Size
Size (GSF): 536,500
Size (NSF):
Size (ASF):
Cleanroom (NSF):
Labs (NSF):
Offices (NSF):
Conferences (NSF):
Maximum Planned Building Occupancy
Principle Investigators:
Research Technical Personnel:
Office and Administrative:
Other:
Total Occupancy:
Schedule and Milestones:
Design Start-End: 01/1993-3/1997
12/1999-5/2000
Construction Start: 10/2000
Construction End: 12/2003
Equipment/Tools Installation Complete:
Startup:
Occupancy: 12/2003
Design Consultants:
Architectural - Lead: HDR Architecture, Inc.
Architectural - Second: -
MEP HDR Architecture, Inc.
Contractors/CMs:
Clark/Gilford Joint Venture
Green Contracting
Related Links:
- http://aml.nist.gov/
- http://www.nano.gov/html/centers/NISTcenters.html
- http://www.hdrinc.com/13/38/1/default.aspx?projectID=187
Plans,Sections and Elevations:
Plan
Floor Plan (pdf, 463 KB)
Sections
Section A-A (pdf, 252 KB)
Section B-B (pdf, 224 KB)
Section C-C (pdf, 235 KB)
Section D-D (pdf, 222 KB)
Project Photos:
Related Documents:
For additional documentation about this project, please download NIST AML Tour Book: Download pdf file (3.05MB)
Project Cost
Project Cost: $235,200,000
Construction Cost (excludes hookup): $175,920,135
Capabilities and Processes:
Cleanroom:
Photolithography
Furnace
CVD /  PVD
Metal Etch
Wet Etch
Metrology
Wafer Probe
Laboratories (Division/Groups)
Electricity
- Electronic Instrument & Metrology
- Fundamental Electrical Measurements
Semiconductor Electronics
- Material Technology
- Device Technology
Precision Engineering
- Large Scale Coordinate Metrology
- Mid Scale & Complex-form Metrology
- Surface & Microform Metrology
- Nano-Scale Metrology
Automated Production Technology
- Acoustics, Mass & Vibrations
- Sensor Systems
Chemical Kinetics and
Thermodynamics
  Experimental Chemical
  Kinetics
Surface & Microanalysis Science
- Microanalysis Research
- Surface Dynamical Processes
- Analytical Microscopy
Thermophysics
  Pressure and Vacuum
Electron and Optical Physics
- Electron Physics
 Atomic Physics
  Plasma Radiations
  Laser Cooled and Trapped Atoms
Radiometric Physics
  Laser Applications
Quantum Metrology
  X-Ray Spectroscopy
Ceramics
  Photonic Lab-Optical Materials
   
Environmental Criteria:
Building 215:
Temperature: 0.25C
Humidity: 5%
Vibration: NIST-A
Cleanliness: Main Lab: M3.5 (Class 100)
Service Corr: M4.5 (Class 1,000)
Building 216:
Temperature: 0.25C
Humidity: 5%
Vibration: NIST-A
Cleanliness: Lab: Unclassified, HEPA Filtered
Office: Unclassified, 95% Filtered
Building 218:
Temperature: 0.01C, 0.1C, or 0.25C
Humidity: 1% or 5%
Vibration: NIST -A for slab on grade
NIST-A1 for slab on air spring
Cleanliness: Lab: M3.5 (Class 100), M4.5 (Class 1,000), M5.5 (class 10,000), or Unclassified, HEPA Filtered
Building 219:
Temperature: 0.01C, 0.1C, or 0.25C
Humidity: 1% or 5%
Vibration: NIST -A for slab on grade
NIST-A1 for slab on air spring
Cleanliness: Lab: M3.5 (Class 100), M4.5 (Class 1,000), M5.5 (class 10,000), or Unclassified, HEPA Filtered
Noise
General Laboratories NC45
Cleanrooms NC55
Other Criterion A & B spaces NC45
Criterion A1 Spaces NC3
Electro Magnetic Interference
 
General laboratories/Electrical Characterization 3 milligause


page last updated: October 2004